EFFECTS OF HYDROGEN ON GROWTH-MECHANISM OF GAAS IN CHEMICAL BEAM EPITAXY

被引:13
作者
NAGATA, K
IIMURA, Y
AOYAGI, Y
NAMBA, S
DEN, S
MORITANI, A
机构
[1] IRIE KOKEN CO LTD,KAWAGOE,SAITAMA 356,JAPAN
[2] NIPPON STEEL CORP,RES & DEV LAB 1,NAKAHARA KU,KAWASAKI 211,JAPAN
关键词
D O I
10.1016/0022-0248(88)90538-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
9
引用
收藏
页码:265 / 269
页数:5
相关论文
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