CONTINUOUS ROUGHNESS CHARACTERIZATION FROM ATOMIC TO MICRON DISTANCES - ANGLE-RESOLVED ELECTRON AND PHOTON SCATTERING

被引:12
作者
PIETSCH, GJ [1 ]
HENZLER, M [1 ]
HAHN, PO [1 ]
机构
[1] WACKER CHEMITRON,RES CTR,D-8263 BURGHAUSEN,FED REP GER
关键词
D O I
10.1016/0169-4332(89)90462-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
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页码:457 / 472
页数:16
相关论文
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