NUCLEATION AND GROWTH OF SILICON BY CVD

被引：69

作者：

BLOEM, J ^{[1
]}

机构：

[1] CATHOLIC UNIV NIJMEGEN, SOLID STATE CHEM LAB, RIM, NIJMEGEN, NETHERLANDS

来源：

JOURNAL OF CRYSTAL GROWTH | 1980年 / 50卷 / 03期

关键词：

D O I：

10.1016/0022-0248(80)90002-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：581 / 604

页数：24

共 120 条

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