PROCESSING EFFECTS ON THE TRIBOLOGICAL CHARACTERISTICS OF REACTIVELY SPUTTERED CHROMIUM-OXIDE (CR2O3) OVERCOAT FILMS

被引：57

作者：

KAO, AS

DOERNER, MF

NOVOTNY, VJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 11期

关键词：

D O I：

10.1063/1.343722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5315 / 5321

页数：7

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