ON THE MODULATION OF ELECTRON-ENERGY DISTRIBUTION FUNCTION IN RADIOFREQUENCY SIH4, SIH4-H2 BULK PLASMAS

被引：26

作者：

CAPITELLI, M

GORSE, C

WINKLER, R

WILHELM, J

机构：

[1] UNIV BARI,DEPARTIMENTO CHIM,I-70124 BARI,ITALY

[2] AKAD WISSENSCH DDR,ZENT INST ELECTR PHYS,INST GASENTLENDUNGSPHYS RUDOLF SEELIGER 5,DDR-2200 GREIFSWALD,GER DEM REP

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1988年 / 8卷 / 04期

关键词：

D O I：

10.1007/BF01016057

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：399 / 424

页数：26

共 23 条

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