HIGHLY TETRAHEDRAL, DIAMOND-LIKE AMORPHOUS HYDROGENATED CARBON PREPARED FROM A PLASMA BEAM SOURCE

被引：144

作者：

WEILER, M ^{[1
]}

SATTEL, S ^{[1
]}

JUNG, K ^{[1
]}

EHRHARDT, H ^{[1
]}

VEERASAMY, VS ^{[1
]}

ROBERTSON, J ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,DEPT ENGN,CAMBRIDGE CB2 1PZ,ENGLAND

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 21期

关键词：

D O I：

10.1063/1.111428

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A highly tetrahedral, diamond-like form of hydrogenated amorphous carbon (a-C:H) with density of 2.9 g cm-3, sp fraction of 0.75, and hardness of 61 GPa, the highest values so far attained from a hydrocarbon source gas, has been deposited from acetylene in a novel plasma beam source. The ion energy for highest sp3 fraction is measured to be about 100 eV per C atom, similar to that for a-C, indicating that the subplantation deposition model of a-C also describes a-C:H.

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页码：2797 / 2799

页数：3

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