EFFECTS OF SUBSTITUTED ELEMENTS INTO THE CR-LAYER ON A CONICR/CR SPUTTERED HARD DISK

被引：5

作者：

TANI, N

HASHIMOTO, M

MURATA, Y

ISHIKAWA, M

OTA, Y

NAKAMURA, K

机构：

[1] Institute for Super Materials, ULVAC JAPAN, Ltd., Chiba 289-12

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 67卷 / 12期

关键词：

D O I：

10.1063/1.345810

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A study was made on the effects of elements substituted into the Cr layer on a CoNiCr/Cr sputtered hard disk. Among the various elements tried, Si, Gd, Ce, and Cu were found to increase the coercive force in the film. For Si and Gd, alloy targets of Cr-Si and Cr-Gd were prepared, and the deposited films indicated an increase of the coercive force by about 150 Oe over those without Si or Gd element.

引用

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页码：7507 / 7509

页数：3

相关论文

共 9 条

[1]

GARTER G, 1968, ION BOMBARDMENT SOLI, P325

[2] FILM STRUCTURE AND MAGNETIC-PROPERTIES OF CONICR/CR SPUTTERED THIN-FILM [J].

ISHIKAWA, M ;

TANI, N ;

YAMADA, T ;

OTA, Y ;

NAKAMURA, K ;

ITOH, A .

IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) :573-575

[3] SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV [J].

LAEGREID, N ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1961, 32 (03) :365-&

[4] GT TARGET, A NEW HIGH-RATE SPUTTERING TARGET OF MAGNETIC-MATERIALS [J].

NAKAMURA, K ;

YAMADA, T ;

OHTA, Y ;

ITOH, A .

IEEE TRANSACTIONS ON MAGNETICS, 1982, 18 (06) :1080-1082

[5] SPUTTERING EXPERIMENTS WITH 1- TO 5-KEV AR+ IONS .2. MONOCRYSTALLINE TARGETS OF AL CU AND AU [J].

ROBINSON, MT ;

SOUTHERN, AL .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) :2969-&

[6] SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT [J].

ROSENBERG, D ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) :1842-&

[7]

TANI N, 1988, IEICE CPM8892 TECHN, P23

[8] SPUTTERING TARGET FOR PRODUCTION OF CONICR/CR SPUTTERED HARD DISK [J].

YAMADA, T ;

HIGUCHI, Y ;

TANI, N ;

ISHIKAWA, M ;

OTA, Y ;

NAKAMURA, K ;

ITOH, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1971-1974

[9] CONICR/CR SPUTTERED THIN-FILM DISKS [J].

YAMADA, T ;

TANI, N ;

ISHIKAWA, M ;

OTA, Y ;

NAKAMURA, K ;

ITOH, A .

IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1429-1431