IMPROVEMENT OF PLASMA-ETCHING DURABILITY OF POSITIVE WORKING RESIST BY COPOLYMERIZATION, BLENDING, AND CROSS-LINKING

被引：15

作者：

UENO, N ^{[1
]}

DOI, Y ^{[1
]}

SUGITA, K ^{[1
]}

SASAKI, S ^{[1
]}

NAGATA, S ^{[1
]}

机构：

[1] KURARAY CO LTD,CENT RES LABS,KURASHIKI 710,JAPAN

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 1987年 / 34卷 / 04期

关键词：

D O I：

10.1002/app.1987.070340426

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：1677 / 1691

页数：15

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