ANALYSIS OF TIN BY CHARGED-PARTICLE BEAMS - NUCLEAR-REACTION ANALYSIS, NUCLEAR-REACTION BROADENING AND RUTHERFORD BACKSCATTERING

被引：7

作者：

ROTBERG, VH ^{[1
]}

PERRY, AJ ^{[1
]}

STRANDBERG, CC ^{[1
]}

WAS, G ^{[1
]}

机构：

[1] GTE VALENITE CORP,TROY,MI 48084

来源：

THIN SOLID FILMS | 1988年 / 166卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90380-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：191 / 199

页数：9

共 28 条

[21] REACTIVE HIGH-RATE DC SPUTTERING - DEPOSITION RATE, STOICHIOMETRY AND FEATURES OF TIOX AND TINX FILMS WITH RESPECT TO THE TARGET MODE [J].

SCHILLER, S ;

BEISTER, G ;

SIEBER, W .

THIN SOLID FILMS, 1984, 111 (03) :259-268

[22] PEAK RESOLVING OF COMPLEX AUGER-SPECTRA BY LEAST-SQUARES FITTING WITH PREFILTERING OF SPECTRA - AN APPLICATION TO DEPTH PROFILING [J].

SEKINE, T ;

ANDO, Y ;

TOKUMASU, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1557-1561

[23]

SIMPSON JCB, 1986, NUCL INSTRUM METH B, V24, P701

[24] CRYSTALLINE EFFECTS IN SINGLE-CRYSTAL AND HIGHLY TEXTURED TINX FILMS [J].

STRANDBERG, C ;

PERRY, AJ .

SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) :131-136

[25]

TOROK E, 1987, THIN SOLID FILMS, V153

[26]

TOTH LE, 1971, TRANSITION METAL CAR, P88

[27] THE EFFECT OF NITROGEN-CONTENT ON THE CRITICAL NORMAL FORCE IN SCRATCH TESTING OF TI-N FILMS [J].

VALLI, J ;

MOLARIUS, JM ;

KORHONEN, AS .

THIN SOLID FILMS, 1987, 154 (1-2) :351-360

[28]

1985, CRC HDB CHEM PHYSICS, pB235

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