SIMPLE ANALYTICAL MODELS FOR THE TEMPERATURE-DEPENDENT THRESHOLD BEHAVIOR OF DEPLETION-MODE DEVICES

被引:13
作者
JAEGER, RC
GAENSSLEN, FH
机构
[1] IBM General Systems Division, Boca Raton
[2] IBM Thomas J. Watson Research Center, Yorktown Heights
关键词
D O I
10.1109/JSSC.1979.1051193
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Threshold voltage shifts in ion-implanted depletion-mode MOSFET's depart substantially from the usual dose proportional shift of enhancement-mode devices. Analytic expressions for the relationship between threshold voltage shift and implanted donor dose and position are extended to include impurity freezeout at low temperatures, and a simple model for the observed low substrate sensitivity at low temperature is presented. Criteria to avoid parasitic subthreshold conduction in depletion-mode devices are also established using the threshold shift formulation. Copyright © 1979 by The Institute of Electrical and Electronics Engineers, Inc.
引用
收藏
页码:423 / 430
页数:8
相关论文
共 19 条