AUGER ANALYSIS OF SUBSTRATE-LAYER INTERACTIONS IN CHEMICAL VAPOR-DEPOSITION AND ACTIVATED REACTIVE EVAPORATION OF TIC

被引：10

作者：

SHARMA, NK

WILLIAMS, WS

机构：

来源：

THIN SOLID FILMS | 1978年 / 54卷 / 01期

关键词：

D O I：

10.1016/0040-6090(78)90279-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：75 / 83

页数：9

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