THE PHYSICS AND CHEMISTRY OF THE LITHOGRAPHIC PROCESS

被引：20

作者：

BOWDEN, MJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 05期

关键词：

D O I：

10.1149/1.2127577

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C195 / C214

页数：20

共 67 条

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