POLYCRYSTALLINE TUNGSTEN AND IRIDIUM PROBE TIP PREPARATION WITH A GA+ FOCUSED ION-BEAM

被引：13

作者：

HOPKINS, LC ^{[1
]}

GRIFFITH, JE ^{[1
]}

HARRIOTT, LR ^{[1
]}

VASILE, MJ ^{[1
]}

机构：

[1] LOUISIANA TECH UNIV,INST MICROMFG,RUSTON,LA 71273

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期

关键词：

D O I：

10.1116/1.588376

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have used a Ga+ focused ion beam (FIB) milling technique to produce sharp scanning-probe microscope tips. The FIB procedure employs a roughly 0.2-μm-diam 20 keV Ga ion beam vector scanned in an annular pattern across the apex of an electrochemically etched wire. This method usually produces exceptionally sharp conical tips, but occasionally it generates a nearly cylindrical spike at the apex. In this paper, we show examples of the spikes, and we discuss possible mechanisms by which they are produced.

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页码：335 / 337

页数：3

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