COMPENSATION MECHANISM IN HEAVILY SI-DOPED GAAS GROWN BY MBE

被引:15
作者
UEMATSU, M
MAEZAWA, K
机构
[1] NTT LSI Laboratories, Atsugi-shi, Kanagawa
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 04期
关键词
Carrier compensation; DX center; Laser Raman spectroscopy; Localized vibrational modes; MBE growth; Si-d oped GaAs;
D O I
10.1143/JJAP.29.L527
中图分类号
O59 [应用物理学];
学科分类号
摘要
The concentrations of Si-related sites in heavily Si-doped GaAs grown by MBE at 450°C and 65O°C are investigated by laser Raman spectroscopy. Almost all of the Si atoms are incorporated on Ga sites in both samples. However, in the 650°C sample, about one third of the Si atoms on Ga sites (SiGa) associate with Ga vacancies (VGa) to form the SiGa-VGaacceptors, which dominate the compensation mechanism. © 1990 IOP Publishing Ltd.
引用
收藏
页码:L527 / L529
页数:3
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