SN INCORPORATION AND ELECTRON-CONCENTRATION IN VAPOR-PHASE EPITAXIALLY GROWN GAAS

被引:14
作者
MAIER, M [1 ]
HANEL, B [1 ]
BALK, P [1 ]
机构
[1] RHEIN WESTFAL TH AACHEN,INST SEMICOND ELECTR,BEREICH SONDER FORSCH FESTKORPERELECTR 56,D-5100 AACHEN,FED REP GER
关键词
D O I
10.1063/1.328498
中图分类号
O59 [应用物理学];
学科分类号
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页码:342 / 343
页数:2
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