X-RAY-DIFFRACTION INVESTIGATIONS OF ADHERENT AND FREE STANDING TIN COATINGS DEPOSITED BY MAGNETRON SPUTTERING

被引:9
作者
VALVODA, V [1 ]
KUZEL, R [1 ]
DOBIASOVA, L [1 ]
CERNY, R [1 ]
POULEK, V [1 ]
MUSIL, J [1 ]
机构
[1] CZECHOSLOVAK ACAD SCI, INST PHYS, CS-18040 PRAGUE 8, CZECHOSLOVAKIA
关键词
D O I
10.1016/0257-8972(90)90148-6
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
TiN coatings deposited on steel substrates at different biases and temperatures, and with different nitrogen contents, were studied by conventional X-ray powder diffractometry. The diffraction peaks were separated by profile fitting. In adherent films different kinds of texture and a large anisotropy of lattice parameters (a(hhh) < a(h00) < a(hh0)) were detected. In corresponding free-standing films lower average values of lattice parameters were found and their anisotropy decreased considerably. The microstrain determined from X-ray line broadening remained unchanged, which proves its inelastic nature owing to the lattice defects. © 1990.
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页码:377 / 388
页数:12
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