INTERNAL-STRESS MINIMIZATION IN THE FABRICATION OF TRANSMISSIVE MULTILAYER X-RAY OPTICS

被引：22

作者：

JANKOWSKI, AF

BIONTA, RM

GABRIELE, PC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.576120

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：210 / 213

页数：4

共 36 条

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