MECHANISM OF GA IMPLANTATION-INDUCED INTERMIXING OF GAAS-ALGAAS MATERIAL

被引:15
作者
HIRAYAMA, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 02期
关键词
D O I
10.1143/JJAP.28.L162
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L162 / L165
页数:4
相关论文
共 17 条
  • [1] OPTICALLY DETECTED CARRIER CONFINEMENT TO ONE AND ZERO DIMENSION IN GAAS QUANTUM-WELL WIRES AND BOXES
    CIBERT, J
    PETROFF, PM
    DOLAN, GJ
    PEARTON, SJ
    GOSSARD, AC
    ENGLISH, JH
    [J]. APPLIED PHYSICS LETTERS, 1986, 49 (19) : 1275 - 1277
  • [2] KINETICS OF IMPLANTATION ENHANCED INTERDIFFUSION OF GA AND AL AT GAAS-GAXAL1-XAS INTERFACES
    CIBERT, J
    PETROFF, PM
    WERDER, DJ
    PEARTON, SJ
    GOSSARD, AC
    ENGLISH, JH
    [J]. APPLIED PHYSICS LETTERS, 1986, 49 (04) : 223 - 225
  • [3] Crank J, 1979, MATH DIFFUSION, DOI [10.1021/ja01562a072, DOI 10.1021/JA01562A072]
  • [5] ARSENIC PRESSURE-DEPENDENCE OF INTERDIFFUSION OF ALGAAS/GAAS INTERFACE IN QUANTUM-WELL
    FURUYA, A
    WADA, O
    TAKAMORI, A
    HASHIMOTO, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (06): : L926 - L928
  • [6] EFFECTS OF DIELECTRIC ENCAPSULATION AND AS OVERPRESSURE ON AL-GA INTERDIFFUSION IN ALXGA1-XAS-GAAS QUANTUM-WELL HETEROSTRUCTURES
    GUIDO, LJ
    HOLONYAK, N
    HSIEH, KC
    KALISKI, RW
    PLANO, WE
    BURNHAM, RD
    THORNTON, RL
    EPLER, JE
    PAOLI, TL
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (04) : 1372 - 1379
  • [7] ION-BEAM-INDUCED ATOMIC MIXING
    HAFF, PK
    SWITKOWSKI, ZE
    [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386
  • [8] ION-SPECIES DEPENDENCE OF INTERDIFFUSION IN ION-IMPLANTED GAAS-ALAS SUPERLATTICES
    HIRAYAMA, Y
    SUZUKI, Y
    OKAMOTO, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1985, 24 (11): : 1498 - 1502
  • [9] FABRICATION OF A GAAS QUANTUM-WELL-WIRE STRUCTURE BY GA FOCUSED-ION-BEAM IMPLANTATION AND ITS OPTICAL-PROPERTIES
    HIRAYAMA, Y
    TARUCHA, S
    SUZUKI, Y
    OKAMOTO, H
    [J]. PHYSICAL REVIEW B, 1988, 37 (05): : 2774 - 2777
  • [10] ELECTRICAL-PROPERTIES OF GA ION-BEAM IMPLANTED GAAS EPILAYER
    HIRAYAMA, Y
    OKAMOTO, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (12): : L965 - L967