SOME PROPERTIES OF THIN ALUMINUM NITRIDE FILMS FORMED IN A GLOW-DISCHARGE

被引:8
作者
UEMURA, Y [1 ]
TANAKA, K [1 ]
IWATA, M [1 ]
机构
[1] NATL INST RES INORG MAT,KURAKAKE,SAKURA,NIIHARI,IBARAKI,JAPAN
关键词
D O I
10.1016/0040-6090(74)90028-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:11 / 16
页数:6
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