SECONDARY ION EMISSION AND SPUTTER YIELDS FROM METAL TARGETS UNDER F2+ BOMBARDMENT

被引:11
作者
REUTER, W
CLABES, JG
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D O I
10.1021/ac00165a012
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
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页码:1404 / 1408
页数:5
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