ADSORPTION OF ATOMIC NITROGEN AT GAAS(110) SURFACES

被引：15

作者：

BERGER, A ^{[1
]}

TROOST, D ^{[1
]}

MONCH, W ^{[1
]}

机构：

[1] UNIV DUISBURG GESAMTHSCH,SONDERFORSCH BEREICH 254,W-4100 DUISBURG,GERMANY

来源：

VACUUM | 1990年 / 41卷 / 1-3期

关键词：

D O I：

10.1016/S0042-207X(05)80157-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The interaction of nitrogen atoms with cleaved GaAs(110) surfaces was studied at room temperature by using Auger electron, low-energy electron energy-loss, and uv photoemission spectroscopy (AES, LEELS, UPS) as well as a Kelvin probe. For reasons of comparison AES and EELS were also applied to a GaN(0001) sample. At low exposures a chemisorption of the nitrogen atoms at the GaAs(110) surface was observed. For larger exposures, the experimental results obtained are indicating the formation of a GaN surface layer via an anion exchange. © 1990 Pergamon Press plc.

引用

页码：669 / 671

页数：3

共 11 条

[1] INTERACTION OF GA AND AS2 MOLECULAR BEAMS WITH GAAS SURFACES [J].

ARTHUR, JR .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (08) :4032-&

[2] PHOTOEMISSION-STUDIES OF THE REACTIONS OF AMMONIA AND N-ATOMS WITH SI(100)-(2X1) AND SI(111)-(7X7) SURFACES [J].

BOZSO, F ;

AVOURIS, P .

PHYSICAL REVIEW B, 1988, 38 (06) :3937-3942

[3]

CEBULLA M, IN PRESS

[4] CLEANING AND NITRIDATION OF GAAS-SURFACES IN MULTIPOLAR PLASMAS INVESTIGATED BY INSITU PHOTOEMISSION AND SPECTROSCOPIC ELLIPSOMETRY [J].

FRIEDEL, P ;

LANDESMAN, JP ;

BOHER, P ;

SCHNEIDER, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04) :1129-1134

[5] PHOTOEMISSION-STUDY OF THE PASSIVATION OF GAAS IN A NITROGEN MULTIPOLAR PLASMA [J].

FRIEDEL, P ;

LANDESMAN, JP .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (06) :711-719

[6] INTERACTIONS BETWEEN H-2 AND N-2 PLASMAS AND A GAAS(100) SURFACE - CHEMICAL AND ELECTRONIC-PROPERTIES [J].

FRIEDEL, P ;

GOURRIER, S .

APPLIED PHYSICS LETTERS, 1983, 42 (06) :509-511

[7] ELECTRON-ESCAPE DEPTHS IN GERMANIUM [J].

GANT, H ;

MONCH, W .

SURFACE SCIENCE, 1981, 105 (01) :217-224

[8] CORE LEVEL PHOTOEMISSION-STUDY OF THE INTERACTION OF PLASMAS WITH REAL GAAS (100) SURFACES [J].

GOURRIER, S ;

FRIEDEL, P ;

LARSEN, PK .

SURFACE SCIENCE, 1985, 152 (APR) :1147-1152

[9] PHOTOEMISSION-STUDIES OF MOLECULAR-BEAM EPITAXIALLY GROWN GAAS (001) SURFACES EXPOSED TO A NITROGEN PLASMA [J].

GOURRIER, S ;

SMIT, L ;

FRIEDEL, P ;

LARSEN, PK .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (07) :3993-3997

[10]

MURSCHALL R, 1982, SOLID STATE COMMUN, V42, P783

← 1 2 →