INSITU SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION OBSERVATION OF GAAS-SURFACES DURING MOLECULAR-BEAM EPITAXIAL-GROWTH

被引：16

作者：

ISU, T

HATA, M

WATANABE, A

KATAYAMA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.584631

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：714 / 719

页数：6

相关论文

共 11 条

[1] GAAS EPITAXY BY A MOLECULAR BEAM METHOD - OBSERVATIONS OF SURFACE STRUCTURE ON (001) FACE
CHO, AY
[J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (05) : 2074 - &
[2] ORIGIN OF REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION INTENSITY OSCILLATIONS DURING MOLECULAR-BEAM EPITAXY - A COMPUTATIONAL MODELING APPROACH
CLARKE, S
VVEDENSKY, DD
[J]. PHYSICAL REVIEW LETTERS, 1987, 58 (21) : 2235 - 2238
[3] HARRIS JJ, 1981, SURF SCI, V103, pL90, DOI 10.1016/0039-6028(81)90091-1
[4] OBSERVATION OF SI(111) SURFACE-TOPOGRAPHY CHANGES DURING SI MOLECULAR-BEAM EPITAXIAL-GROWTH USING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION
ICHIKAWA, M
DOI, T
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (17) : 1141 - 1143
[5] REAL-TIME OBSERVATION OF GAAS (001) SURFACES DURING MOLECULAR-BEAM EPITAXY BY SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION
ISU, T
WATANABE, A
HATA, M
KATAYAMA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (12): : L2259 - L2261
[6] RHEED STUDIES OF HETEROJUNCTION AND QUANTUM-WELL FORMATION DURING MBE GROWTH - FROM MULTIPLE-SCATTERING TO BAND OFFSETS
JOYCE, BA
DOBSON, PJ
NEAVE, JH
WOODBRIDGE, K
ZHANG, J
LARSEN, PK
BOLGER, B
[J]. SURFACE SCIENCE, 1986, 168 (1-3) : 423 - 438
[7] DYNAMICS OF FILM GROWTH OF GAAS BY MBE FROM RHEED OBSERVATIONS
NEAVE, JH
JOYCE, BA
DOBSON, PJ
NORTON, N
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01): : 1 - 8
[8] STRUCTURE AND STOICHIOMETRY OF (100)-GAAS SURFACES DURING MOLECULAR-BEAM EPITAXY
NEAVE, JH
JOYCE, BA
[J]. JOURNAL OF CRYSTAL GROWTH, 1978, 44 (04) : 387 - 397
[9] MICROSCOPY OF SURFACES AND APPLICATIONS TO MOLECULAR-BEAM EPITAXY
PETROFF, PM
CHEN, CH
WERDER, DJ
[J]. ULTRAMICROSCOPY, 1985, 17 (03) : 185 - 191
[10] REFLECTION ELECTRON-MICROSCOPIC OBSERVATION OF HIGH-TEMPERATURE GROWN GAAS-SURFACES OF MOLECULAR-BEAM EPITAXY
SHIMIZU, N
MUTO, S
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (10) : 743 - 745