A new drain current model applicable to deep submicrometer MOSFET's is proposed. The new pseudo-two-dimensional device model includes velocity overshoot effect by the use of the extended drift-diffusion (EDD) model. Calculated current-voltage characteristics agree well with the reported experimental data for deep submicrometer MOSFET's. The new model is verified to be applicable to small-geometry MOSFET's down to L = 0.1-mu-m while the conventional models without the velocity overshoot are valid to 0.25-mu-m.