ULTRAVIOLET-ENHANCED OXIDATION OF SILICON

被引：58

作者：

OREN, R

GHANDHI, SK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 02期

关键词：

D O I：

10.1063/1.1660091

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：752 / &

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