COMPUTED RESULTS FOR THE DEPOSITION RATES AND TRANSPORT PHENOMENA FOR AN MOCVD SYSTEM WITH A CONICAL ROTATING SUBSTRATE

被引：12

作者：

DILAWARI, AH

SZEKELY, J

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 97卷 / 3-4期

关键词：

D O I：

10.1016/0022-0248(89)90582-4

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

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页码：777 / 791

页数：15

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