SYNCHROTRON RADIATION-EXCITED CHEMICAL VAPOR-DEPOSITION OF SIXNYHZ FILM

被引：58

作者：

KYURAGI, H

URISU, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 05期

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D O I：

10.1063/1.338001

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：2035 / 2037

页数：3

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