THE PHYSICS OF ONO LAYER DIELECTRICS

被引：15

作者：

SPITZER, A

BAUNACH, R

机构：

来源：

APPLIED SURFACE SCIENCE | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90433-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：192 / 199

页数：8

共 18 条

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SPITZER, A .

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[7] LIFETIME OF THIN OXIDE AND OXIDE-NITRIDE-OXIDE DIELECTRICS WITHIN TRENCH CAPACITORS FOR DRAMS [J].

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IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (05) :913-919

[8]

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[9]

HONLEIN W, 1989, APPL SURF SCI, V39, P174

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