ANODIC-OXIDATION OF GAAS IN AN OXYGEN PLASMA GENERATED BY A DC ELECTRICAL-DISCHARGE

被引：35

作者：

KOSHIGA, F

SUGANO, T

机构：

来源：

THIN SOLID FILMS | 1979年 / 56卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(79)90050-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：39 / 49

页数：11

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