MODELS FOR THE OXIDATION OF SILICON

被引：50

作者：

LEWIS, EA

IRENE, EA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.574007

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：916 / 925

页数：10

相关论文

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