DEPTH PROFILING OF MICROELECTRONIC STRUCTURES BY SIMS AND AES

被引：7

作者：

MAIER, M

机构：

来源：

VACUUM | 1986年 / 36卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(86)90217-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：409 / 412

页数：4

共 25 条

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