BEHAVIOR OF DEFECTS INDUCED BY METALLIC IMPURITIES ON SI(100) SURFACES

被引：52

作者：

HOURAI, M ^{[1
]}

MURAKAMI, K ^{[1
]}

SHIGEMATSU, T ^{[1
]}

FUJINO, N ^{[1
]}

SHIRAIWA, T ^{[1
]}

机构：

[1] OSAKA TITANIUM CO LTD, AMAGASAKI, HYOGO 660, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1989年 / 28卷 / 12期

关键词：

D O I：

10.1143/JJAP.28.2413

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2413 / 2420

页数：8

共 37 条

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