ON THE DEVELOPMENT OF INCREASING SURFACE-ROUGHNESS DURING ION SPUTTERING

被引：34

作者：

MARTON, D

FINE, J

机构：

[1] Surface Science Division, National Bureau of Standards, Gaithersburg, 20899 MD, United States

来源：

THIN SOLID FILMS | 1987年 / 151卷 / 03期

关键词：

Vorburger. One of us (D.M.) would like to express his gratitude to the Hungarian and U.S. Governments for support and a Fulbright stipend;

D O I：

10.1016/0040-6090(87)90142-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：433 / 439

页数：7

共 30 条

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