FORMATION OF HOLOGRAPHIC DIFFRACTION GRATINGS IN PHOTORESIST

被引：42

作者：

MASHEV, L

TONCHEV, S

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1981年 / 26卷 / 03期

关键词：

D O I：

10.1007/BF00614748

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：143 / 149

页数：7

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共 17 条

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