ETCH FEATURES IN CZOCHRALSKI-GROWN SINGLE-CRYSTAL INDIUM-PHOSPHIDE

被引：38

作者：

BROWN, GT

COCKAYNE, B

MACEWAN, WR

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1980年 / 15卷 / 10期

关键词：

D O I：

10.1007/BF00550758

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：2539 / 2549

页数：11

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