ANALYSIS OF NONLINEARITY IN HIGH-SENSITIVITY PIEZORESISTIVE PRESSURE SENSORS

被引：12

作者：

MARCO, S ^{[1
]}

SAMITIER, J ^{[1
]}

RUIZ, O ^{[1
]}

MORANTE, JR ^{[1
]}

ESTEVE, J ^{[1
]}

机构：

[1] CTR NACL MICROELECTR,E-08193 BARCELONA,SPAIN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80133-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An extensive FEM analysis is presented on novel structures for miniature pressure sensors obtained by electrochemical etch stop on diffused membranes. The theoretical possibilities of each structure, in order to achieve the highest sensibility with the lowest nonlinearity, are considered on the basis of a new graphical method.

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收藏

页码：790 / 795

页数：6

相关论文

共 13 条

[1] STRESS-CONCENTRATION STRUCTURE WITH FRONT BEAM FOR PRESSURE SENSOR [J].

BAO, MH ;

YU, LZ ;

WANG, Y .

SENSORS AND ACTUATORS A-PHYSICAL, 1991, 28 (02) :105-112

[2] MICROMACHINED BEAM-DIAPHRAGM STRUCTURE IMPROVES PERFORMANCES OF PRESSURE TRANSDUCER [J].

BAO, MH ;

YU, LZ ;

WANG, Y .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :137-141

[3]

BINDER J, 1985, SIEMENS COMP, V2, P64

[4] ON THE EXPERIMENTAL ATTAINMENT OF OPTIMUM CONDITIONS [J].

BOX, GEP ;

WILSON, KB .

JOURNAL OF THE ROYAL STATISTICAL SOCIETY SERIES B-STATISTICAL METHODOLOGY, 1951, 13 (01) :1-45

[5] PASSIVATION ANALYSIS OF MICROMECHANICAL SILICON STRUCTURES OBTAINED BY ELECTROCHEMICAL ETCH-STOP [J].

GOTZ, A ;

ESTEVE, J ;

BAUSELLS, J ;

MARCO, S ;

SAMITIER, J ;

MORANTE, JR .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :744-750

[6] LOW-PRESSURE SENSORS EMPLOYING BOSSED DIAPHRAGMS AND PRECISION ETCH-STOPPING [J].

MALLON, JR ;

POURAHMADI, F ;

PETERSEN, K ;

BARTH, P ;

VERMEULEN, T ;

BRYZEK, J .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :89-95

[7]

MALLON JR, 1984, Patent No. 4467657

[8] NONLINEARITY OF PIEZORESISTANCE EFFECT IN P-TYPE AND N-TYPE SILICON [J].

MATSUDA, K ;

KANDA, Y ;

YAMAMURA, K ;

SUZUKI, K .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :45-48

[9] PIEZORESISTIVE LOW-PRESSURE SENSOR WITH HIGH-SENSITIVITY AND HIGH-ACCURACY [J].

SANDMAIER, H ;

KUHL, K .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :142-145

[10]

SANDMAIER H, 1991, SENSOR ACTUAT A-PHYS, V25, P815