INVESTIGATION OF THE INTERFACE GRADING IN III-V HETEROSTRUCTURES BY DOUBLE-CRYSTAL DIFFRACTOMETRY

被引:9
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FERRARI, C
FRANZOSI, P
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10.1063/1.342970
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O59 [应用物理学];
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页码:1544 / 1549
页数:6
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共 10 条
[1]   X-RAY-DIFFRACTION OF MULTILAYERS AND SUPERLATTICES [J].
BARTELS, WJ ;
HORNSTRA, J ;
LOBEEK, DJW .
ACTA CRYSTALLOGRAPHICA SECTION A, 1986, 42 :539-545
[2]   SENSITIVITY OF X-RAY-DIFFRACTOMETRY FOR STRAIN DEPTH PROFILING IN III-V HETEROSTRUCTURES [J].
BENSOUSSAN, S ;
MALGRANGE, C ;
SAUVAGESIMKIN, M .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1987, 20 :222-229
[3]   LPE HIGHLY PERFECT INGAASP INP STRUCTURE CHARACTERIZATION BY X-RAY DOUBLE CRYSTAL DIFFRACTOMETRY [J].
BOCCHI, C ;
FERRARI, C ;
FRANZOSI, P ;
FORNUTO, G ;
PELLEGRINO, S ;
TAIARIOL, F .
JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (04) :245-250
[4]  
BOCCHI C, 1987, ACTA CRYSTALLOGR A, V43, pC127
[5]   INHOMOGENEITY OF LIQUID-PHASE-EPITAXIAL INGAASP LATTICE MATCHED ON INP - EFFECTS OF TRANSIENT GROWTH [J].
BRUNEMEIER, PE ;
ROTH, TJ ;
HOLONYAK, N ;
STILLMAN, GE .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (06) :1707-1716
[6]   CRYSTAL QUALITY INVESTIGATION OF INGAAS INP AND INGAALAS INP SINGLE HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY [J].
FERRARI, C ;
FRANZOSI, P ;
GASTALDI, L ;
TAIARIOL, F .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) :2628-2632
[7]   THE INTERPRETATION OF X-RAY ROCKING CURVES FROM III-V SEMICONDUCTOR-DEVICE STRUCTURES [J].
HALLIWELL, MAG ;
LYONS, MH ;
HILL, MJ .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (02) :523-531
[8]   ABRUPTNESS OF INGAAS/INP HETEROINTERFACE GROWN BY LIQUID-PHASE EPITAXY [J].
KUBO, M ;
SASAI, Y ;
YOSHIOKA, Y ;
OGURA, M .
JOURNAL OF CRYSTAL GROWTH, 1987, 82 (04) :584-588
[9]   X-RAY DOUBLE-CRYSTAL CHARACTERIZATION OF HIGHLY PERFECT INGAAS INP GROWN BY VAPOR-PHASE EPITAXY [J].
MACRANDER, AT ;
STREGE, KE .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (02) :442-446
[10]  
1968, INT TABLES XRAY CRYS, V4