VARIATION OF CRYSTALLIZATION WITH ARRIVAL RATIO IN TITANIUM NITRIDE FILMS FORMED BY DYNAMIC MIXING METHOD

被引：24

作者：

SATOU, M ^{[1
]}

FUJII, K ^{[1
]}

KIUCHI, M ^{[1
]}

FUJIMOTO, F ^{[1
]}

机构：

[1] OSAKA UNIV,INST SCI IND RES,IBARAKI,OSAKA 567,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90763-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：166 / 169

页数：4

共 13 条

[1] PROPERTIES OF BORON-NITRIDE COATING FILMS PREPARED BY THE ION-BEAM AND VAPOR-DEPOSITION METHOD (IVD) [J].

ANDOH, Y ;

OGATA, K ;

SUZUKI, Y ;

KAMIJO, E ;

SATOU, M ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :787-790

[2] A NEW MACHINE FOR FILM FORMATION BY ION AND VAPOR-DEPOSITION [J].

ANDOH, Y ;

SUZUKI, Y ;

MATSUDA, K ;

SATOU, M ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :111-115

[3] FORMATION OF MOLYBDENUM NITRIDE FILMS BY ION-BEAM AND VAPOR-DEPOSITION METHOD [J].

FUJIMOTO, F ;

NAKANE, Y ;

SATOU, M ;

KOMORI, F ;

OGATA, K ;

ANDOH, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :791-796

[4] TITANIUM NITRIDE CRYSTAL-GROWTH WITH PREFERRED ORIENTATION BY DYNAMIC MIXING METHOD [J].

KIUCHI, M ;

TOMITA, M ;

FUJII, K ;

SATOU, M ;

SHIMIZU, R .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (06) :L938-L940

[5]

KIUCHI M, 1988, NUCL INSTRUM METH B, V33, P649

[6]

KIUCHI M, 1908, NUCL INSTRUM METH B, V37, P701

[7]

MICHEL H, 1986, VIDE, V41, P65

[8] NITRIDE FILM FORMATION BY ION AND VAPOR-DEPOSITION [J].

SATOU, M ;

YAMAGUCHI, K ;

ANDOH, Y ;

SUZUKI, Y ;

MATSUDA, K ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :910-914

[9] COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR-DEPOSITION METHOD [J].

SATOU, M ;

ANDOH, Y ;

OGATA, K ;

SUZUKI, Y ;

MATSUDA, K ;

FUJIMOTO, F .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (06) :656-660

[10] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT [J].

SATOU, M ;

FUJIMOTO, F .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (03) :L171-L172

← 1 2 →