MEASUREMENT OF RESISTIVITY OF A THIN SQUARE SAMPLE WITH A SQUARE 4-PROBE ARRAY

[1] BEWLEY LV, 1963, 2 DIMENSIONAL FIELDS, P157

[2] PLANAR 4-PROBE TEST STRUCTURE FOR MEASURING BULK RESISTIVITY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (08) : 968 - 974

[3] EVALUATION OF GEOMETRICAL EFFECTS IN 4 POINT PROBE MEASUREMENTS [J]. SOLID-STATE ELECTRONICS, 1971, 14 (11) : 1167 - &

[4] 4-POINT PROBE HALL-EFFECT AND RESISTIVITY MEASUREMENTS UPON SEMICONDUCTORS [J]. SOLID-STATE ELECTRONICS, 1972, 15 (05) : 577 - &

[5] MEASUREMENT OF THE SHEET RESISTIVITY OF A SQUARE WAFER WITH A SQUARE 4-POINT PROBE [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (08) : 833 - 837

[6] SEMICONDUCTOR SHEET RESISTIVITY MEASUREMENTS ON SQUARE SAMPLES [J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1964, 41 (11): : 679 - &

[7] van der Pauw L. J., 1958, PHILIPS RES REP, V1958, P1

[8] 4 POINT SHEET RESISTIVITY TECHNIQUES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) : 885 - &

[9] 1975, ANNUAL BOOK ASTM 43

[1] BEWLEY LV, 1963, 2 DIMENSIONAL FIELDS, P157

[2] PLANAR 4-PROBE TEST STRUCTURE FOR MEASURING BULK RESISTIVITY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (08) : 968 - 974

[3] EVALUATION OF GEOMETRICAL EFFECTS IN 4 POINT PROBE MEASUREMENTS [J]. SOLID-STATE ELECTRONICS, 1971, 14 (11) : 1167 - &

[4] 4-POINT PROBE HALL-EFFECT AND RESISTIVITY MEASUREMENTS UPON SEMICONDUCTORS [J]. SOLID-STATE ELECTRONICS, 1972, 15 (05) : 577 - &

[5] MEASUREMENT OF THE SHEET RESISTIVITY OF A SQUARE WAFER WITH A SQUARE 4-POINT PROBE [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (08) : 833 - 837

[6] SEMICONDUCTOR SHEET RESISTIVITY MEASUREMENTS ON SQUARE SAMPLES [J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1964, 41 (11): : 679 - &

[7] van der Pauw L. J., 1958, PHILIPS RES REP, V1958, P1

[8] 4 POINT SHEET RESISTIVITY TECHNIQUES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) : 885 - &

[9] 1975, ANNUAL BOOK ASTM 43