ARSENIC-IMPLANTED EMITTER AND ITS APPLICATION TO UHF POWER TRANSISTORS

被引：11

作者：

TSUKAMOTO, K

AKASAKA, Y

WATARI, Y

KUSANO, Y

HIROSE, Y

NAKAMURA, G

机构：

[1] MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI 664,JAPAN

[2] MITSUBISHI ELECT CORP,KITA ITAMI WORKS,ITAMI 664,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1978年 / 17卷

关键词：

D O I：

10.7567/JJAPS.17S1.187

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：187 / 192

页数：6

共 10 条

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