CURRENT TRANSPORT MECHANISMS IN GAAS/ALAS TUNNEL STRUCTURES GROWN BY METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION

被引:13
作者
BONNEFOI, AR [1 ]
CHOW, DH [1 ]
MCGILL, TC [1 ]
BURNHAM, RD [1 ]
PONCE, FA [1 ]
机构
[1] XEROX CORP,PALO ALTO,CA 94304
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 04期
关键词
D O I
10.1116/1.583503
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:988 / 995
页数:8
相关论文
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