APPLICATION OF SPECTROSCOPIC ELLIPSOMETRY TO COMPLEX SAMPLES

被引：33

作者：

FREEOUF, JL

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 24期

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D O I：

10.1063/1.100411

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：2426 / 2428

页数：3

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