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INSITU STUDIES OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON
被引:28
作者
:
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
机构
:
来源
:
JOURNAL OF NON-CRYSTALLINE SOLIDS
|
1989年
/ 114卷
关键词
:
D O I
:
10.1016/0022-3093(89)90094-X
中图分类号
:
TQ174 [陶瓷工业];
TB3 [工程材料学];
学科分类号
:
0805 ;
080502 ;
摘要
:
引用
收藏
页码:139 / 144
页数:6
相关论文
共 30 条
[1]
IMPROVEMENTS OF PHASE-MODULATED ELLIPSOMETRY
ACHER, O
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ACHER, O
BIGAN, E
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
BIGAN, E
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
DREVILLON, B
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1989,
60
(01)
: 65
-
77
[2]
ANDUJAR JL, COMMUNICATION
[3]
INSITU INVESTIGATION OF THE EARLY STAGE OF THE GROWTH OF A-SI-H ON SILICA AND TIN DIOXIDE SUBSTRATES
ANTOINE, AM
论文数:
0
引用数:
0
h-index:
0
ANTOINE, AM
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
[J].
JOURNAL OF NON-CRYSTALLINE SOLIDS,
1987,
97-8
: 1403
-
1406
[4]
INSITU INVESTIGATION OF THE GROWTH OF RF GLOW-DISCHARGE DEPOSITED AMORPHOUS-GERMANIUM AND SILICON FILMS
ANTOINE, AM
论文数:
0
引用数:
0
h-index:
0
ANTOINE, AM
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
CABARROCAS, PRI
论文数:
0
引用数:
0
h-index:
0
CABARROCAS, PRI
[J].
JOURNAL OF APPLIED PHYSICS,
1987,
61
(07)
: 2501
-
2508
[5]
INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY
ANTOINE, AM
论文数:
0
引用数:
0
h-index:
0
机构:
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
ANTOINE, AM
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
机构:
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
DREVILLON, B
[J].
JOURNAL OF APPLIED PHYSICS,
1988,
63
(02)
: 360
-
367
[6]
ANTOINE AM, 1987, MAT RES SOC S P, V75, P333
[7]
OPTICAL-PROPERTIES OF THIN-FILMS
ASPNES, DE
论文数:
0
引用数:
0
h-index:
0
ASPNES, DE
[J].
THIN SOLID FILMS,
1982,
89
(03)
: 249
-
262
[8]
DEGRADATION OF TIN-DOPED INDIUM-OXIDE FILM IN HYDROGEN AND ARGON PLASMA
BANERJEE, R
论文数:
0
引用数:
0
h-index:
0
BANERJEE, R
RAY, S
论文数:
0
引用数:
0
h-index:
0
RAY, S
BASU, N
论文数:
0
引用数:
0
h-index:
0
BASU, N
BATABYAL, AK
论文数:
0
引用数:
0
h-index:
0
BATABYAL, AK
BARUA, AK
论文数:
0
引用数:
0
h-index:
0
BARUA, AK
[J].
JOURNAL OF APPLIED PHYSICS,
1987,
62
(03)
: 912
-
916
[9]
INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES OF A-SI-H, A-SIC-H AND A-SIGE-H ULTRATHIN FILMS
BENFERHAT, R
论文数:
0
引用数:
0
h-index:
0
BENFERHAT, R
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
[J].
JOURNAL OF NON-CRYSTALLINE SOLIDS,
1987,
97-8
: 835
-
838
[10]
Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances
Bruggeman, DAG
论文数:
0
引用数:
0
h-index:
0
Bruggeman, DAG
[J].
ANNALEN DER PHYSIK,
1935,
24
(07)
: 636
-
664
←
1
2
3
→
共 30 条
[1]
IMPROVEMENTS OF PHASE-MODULATED ELLIPSOMETRY
ACHER, O
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ACHER, O
BIGAN, E
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
BIGAN, E
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE
DREVILLON, B
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1989,
60
(01)
: 65
-
77
[2]
ANDUJAR JL, COMMUNICATION
[3]
INSITU INVESTIGATION OF THE EARLY STAGE OF THE GROWTH OF A-SI-H ON SILICA AND TIN DIOXIDE SUBSTRATES
ANTOINE, AM
论文数:
0
引用数:
0
h-index:
0
ANTOINE, AM
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
[J].
JOURNAL OF NON-CRYSTALLINE SOLIDS,
1987,
97-8
: 1403
-
1406
[4]
INSITU INVESTIGATION OF THE GROWTH OF RF GLOW-DISCHARGE DEPOSITED AMORPHOUS-GERMANIUM AND SILICON FILMS
ANTOINE, AM
论文数:
0
引用数:
0
h-index:
0
ANTOINE, AM
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
CABARROCAS, PRI
论文数:
0
引用数:
0
h-index:
0
CABARROCAS, PRI
[J].
JOURNAL OF APPLIED PHYSICS,
1987,
61
(07)
: 2501
-
2508
[5]
INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY
ANTOINE, AM
论文数:
0
引用数:
0
h-index:
0
机构:
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
ANTOINE, AM
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
机构:
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
SOLEMS SA,ZI GLAISES,F-91120 PALAISEAU,FRANCE
DREVILLON, B
[J].
JOURNAL OF APPLIED PHYSICS,
1988,
63
(02)
: 360
-
367
[6]
ANTOINE AM, 1987, MAT RES SOC S P, V75, P333
[7]
OPTICAL-PROPERTIES OF THIN-FILMS
ASPNES, DE
论文数:
0
引用数:
0
h-index:
0
ASPNES, DE
[J].
THIN SOLID FILMS,
1982,
89
(03)
: 249
-
262
[8]
DEGRADATION OF TIN-DOPED INDIUM-OXIDE FILM IN HYDROGEN AND ARGON PLASMA
BANERJEE, R
论文数:
0
引用数:
0
h-index:
0
BANERJEE, R
RAY, S
论文数:
0
引用数:
0
h-index:
0
RAY, S
BASU, N
论文数:
0
引用数:
0
h-index:
0
BASU, N
BATABYAL, AK
论文数:
0
引用数:
0
h-index:
0
BATABYAL, AK
BARUA, AK
论文数:
0
引用数:
0
h-index:
0
BARUA, AK
[J].
JOURNAL OF APPLIED PHYSICS,
1987,
62
(03)
: 912
-
916
[9]
INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES OF A-SI-H, A-SIC-H AND A-SIGE-H ULTRATHIN FILMS
BENFERHAT, R
论文数:
0
引用数:
0
h-index:
0
BENFERHAT, R
DREVILLON, B
论文数:
0
引用数:
0
h-index:
0
DREVILLON, B
[J].
JOURNAL OF NON-CRYSTALLINE SOLIDS,
1987,
97-8
: 835
-
838
[10]
Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances
Bruggeman, DAG
论文数:
0
引用数:
0
h-index:
0
Bruggeman, DAG
[J].
ANNALEN DER PHYSIK,
1935,
24
(07)
: 636
-
664
←
1
2
3
→