OBSERVATION ON LASER-ANNEALED SILICON-ON-INSULATOR STRUCTURES BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY

被引：5

作者：

OGURA, A

TERAO, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 10期

关键词：

D O I：

10.1063/1.339136

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4170 / 4173

页数：4

共 11 条

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