RADIATION-INDUCED DEFECTS IN CVD-GROWN 3C-SIC

被引:90
作者
ITOH, H [1 ]
YOSHIKAWA, M [1 ]
NASHIYAMA, I [1 ]
MISAWA, S [1 ]
OKUMURA, H [1 ]
YOSHIDA, S [1 ]
机构
[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1109/23.101184
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Radiation induced defects in 3C-SiC epitaxially grown by chemical vapor deposition method were studied with electron spin resonance (ESR) technique. A fifteen-line ESR spectrum was observed in 2MeV proton and 1MeV electron irradiated 3C-SiC when the magnetic field was applied parallel to the <100> axis. This spectrum labeled T1, which has an isotropic g-value of 2.0029±0.0001, is interpreted by simultaneous hyperfine interactions of a paramagnetic electron with surrounding 13C at four carbon sites and 29Si at twelve silicon sites. It indicates that the T1 spectrum arises from a point defect at a silicon site. The observed hyperfine interactions with neighboring 13C and 29Si nuclei are discussed in terms of a simple molecular-orbital treatment of the defect. © 1990 IEEE
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页码:1732 / 1738
页数:7
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