共 31 条
[1]
INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY
[J].
PHYSICAL REVIEW B,
1979, 20 (08)
:3292-3302
[4]
CURRENT STATUS OF THE TECHNOLOGY OF SILICON SEPARATED BY IMPLANTATION OF OXYGEN
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
1989, 2 (1-3)
:111-122
[7]
STRUCTURAL STUDIES OF HYDROGEN-BOMBARDED SILICON USING ELLIPSOMETRY AND TRANSMISSION ELECTRON-MICROSCOPY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (02)
:153-158
[8]
CALIBRATION METHOD FOR ROTATING-ANALYZER ELLIPSOMETERS
[J].
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION,
1988, 5 (09)
:1466-1471
[9]
SYSTEMATIC AND RANDOM ERRORS IN ROTATING-ANALYZER ELLIPSOMETRY
[J].
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION,
1988, 5 (06)
:773-781