INP/IN0.53GA0.47AS HETEROJUNCTION BIPOLAR-TRANSISTORS WITH A CARBON-DOPED BASE GROWN BY MOCVD

被引:22
作者
HANSON, AW
STOCKMAN, SA
STILLMAN, GE
机构
[1] Department of Electrical and Computer Engineering, University of Illinois, Urbana
基金
美国国家科学基金会;
关键词
D O I
10.1109/55.192815
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
InP/In0.53Ga0.47As heterojunction bipolar transistors (HBT's) utilizing a carbon-doped base have been demonstrated. The devices were grown by low-pressure metalorganic chemical vapor deposition (LP-MOCVD) using carbon tetrachloride (CCl4) as the p-type dopant source. These devices exhibit a dc common-emitter current gain of 50 and an emitter-base junction ideality factor of 1.29 in a structure for which no undoped spacer layer was employed at the emitter-base junction. These preliminary results suggest that C-doping of In0.53Ga0.47As may be a suitable alternative to Zn in MOCVD-grown InP/In0.53Ga0.47 As HBTs.
引用
收藏
页码:504 / 506
页数:3
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