STRUCTURE OF TINX (0-LESS-THAN-X-LESS-THAN-1.1) FILMS PREPARED BY IRON BEAM-ASSISTED DEPOSITION

被引：19

作者：

JIANG, H

TAO, K

LI, H

机构：

[1] Department of Materials Science and Engineering, Tsinghua University, Beijing

来源：

THIN SOLID FILMS | 1995年 / 258卷 / 1-2期

关键词：

ION BOMBARDMENT; RUTHERFORD BACKSCATTERING SPECTROMETRY; TITANIUM NITRIDE;

D O I：

10.1016/0040-6090(94)06367-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiNx films with various x values were prepared by ion beam-assisted deposition. The composition and structure of the films were investigated by Rutherford backscattering spectroscopy and X-ray diffraction (XRD). The results of XRD indicated that the films consisted of free alpha-Ti when x was less than 0.5. delta-TiNx films were formed when x was larger than 0.5. At critical value of x = 0.5, an amorphous film was obtained. For the delta-TiNx films, it was observed that the films had preferred orientation. The preferred orientation of the films changed from [111] to [100] with ion current density.

引用

收藏

页码：51 / 55

页数：5

相关论文

共 17 条

[1] ION-BEAM ASSISTED DEPOSITION OF SUBSTOICHIOMETRIC SILICON-NITRIDE [J].

DONOVAN, EP ;

BRIGHTON, DR ;

HUBLER, GK ;

VANVECHTEN, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :983-986

[2]

FOLLSTAEDT DM, 1985, NUCL INSTRUM METH B, V7

[3]

HALVERSON WD, 1990, MATER SCI FORUM, V54, P71

[4] STRUCTURE AND ELECTRICAL-PROPERTIES OF TITANIUM NITRIDE FILMS [J].

IGASAKI, Y ;

MITSUHASHI, H ;

AZUMA, K ;

MUTO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (01) :85-96

[5] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

[6] ION-BEAM MODIFICATION OF TIN FILMS DURING VAPOR-DEPOSITION [J].

KANT, RA ;

SARTWELL, BD .

MATERIALS SCIENCE AND ENGINEERING, 1987, 90 :357-365

[7]

KIUCHI M, 1988, NUCL INSTRUM METH B, V33, P649

[8] FILM FORMATION OF DITITANIUM NITRIDE BY THE DYNAMIC MIXING METHOD [J].

KIUCHI, M ;

FUJII, K ;

MIYAMURA, H ;

KADONO, K ;

SATOU, M ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :701-703

[9] TI-N PHASES FORMED BY REACTIVE ION PLATING [J].

MOLARIUS, JM ;

KORHONEN, AS ;

RISTOLAINEN, EO .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2419-2425

[10] STRUCTURE OF TINX STUDIED BY ELECTRON-DIFFRACTION AND MICROSCOPY [J].

NAGAKURA, S ;

KUSUNOKI, T .

JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1977, 10 (FEB1) :52-56