STEADY-STATE ELECTRON AND HOLE SPACE-CHARGE DISTRIBUTION IN LPCVD SILICON-NITRIDE FILMS

被引：29

作者：

HAMPTON, FL

CRICCHI, JR

机构：

[1] Westinghouse Electric Corporation, Baltimore

来源：

APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 10期

关键词：

D O I：

10.1063/1.90942

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Trapped electron and hole space charge distributions in silicon nitride are derived from steady-state measurements of the change in flatband voltage versus the maximum field in the nitride. These measurements coupled with the Arnett-Yun model provide a good relative measure of the hole and electron trap densities, trapping lengths, and cross sections. Significant differences between hole and electron values at 25 and 175°C were observed.

引用

页码：802 / 804

页数：3

共 13 条

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