A STUDY OF THE OXIDATION OF SELECTED METAL SILICIDES

被引：31

作者：

FRAMPTON, RD ^{[1
]}

IRENE, EA ^{[1
]}

DHEURLE, FM ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 07期

关键词：

D O I：

10.1063/1.339383

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2972 / 2980

页数：9

共 63 条

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[47]

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