共 62 条
[4]
ABERNATHY CR, 1993, MATER RES SOC SYMP P, V300, P3, DOI 10.1557/PROC-300-3
[7]
ELECTRON-CYCLOTRON RESONANCE MICROWAVE DISCHARGES FOR ETCHING AND THIN-FILM DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:883-893
[10]
BAYRAKTAROGLU B, 1989, IEEE MTT S, V37, P1057